http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H08186106-A

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_294881271413951a95f284b588a68e66
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8242
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-792
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-788
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8247
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8246
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-822
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-187
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-108
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B3-00
filingDate 1994-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_850502c63296237f9513a9e3a820d6a1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3a6b5948b42217d1d4fccf224b837ec4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a7a6c8213215e2f437fa22bcac0c5f48
publicationDate 1996-07-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-H08186106-A
titleOfInvention Ferroelectric thin film element and manufacturing method thereof
abstract (57) [Abstract] [PROBLEMS] To provide a ferroelectric thin film element having a large spontaneous polarization value and good fatigue properties, which is obtained by forming a lead zirconate titanate thin film on a ruthenium oxide thin film, and a manufacturing method thereof. . [Structure] First, a ruthenium oxide thin film to be a lower electrode is formed on a substrate by a sol-gel method so that the ruthenium oxide thin film has a grain size of 90 to 160 nm. Next, a lead zirconate titanate thin film, which is a ferroelectric thin film, is formed on this ruthenium oxide thin film by a sol-gel method. Next, a platinum thin film to be an upper electrode is formed on this lead zirconate titanate thin film.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-19980031893-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H10219460-A
priorityDate 1994-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16686084
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450791316
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414004986
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID447866448
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6093376
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458431511
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159452
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449325759
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23939

Total number of triples: 35.