abstract |
(57) [Abstract] [PROBLEMS] To provide a ferroelectric thin film element having a large spontaneous polarization value and good fatigue properties, which is obtained by forming a lead zirconate titanate thin film on a ruthenium oxide thin film, and a manufacturing method thereof. . [Structure] First, a ruthenium oxide thin film to be a lower electrode is formed on a substrate by a sol-gel method so that the ruthenium oxide thin film has a grain size of 90 to 160 nm. Next, a lead zirconate titanate thin film, which is a ferroelectric thin film, is formed on this ruthenium oxide thin film by a sol-gel method. Next, a platinum thin film to be an upper electrode is formed on this lead zirconate titanate thin film. |