http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H08184966-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_385752f237551ca1b257f160a0f2434b |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 1994-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e95f35111d8a2d3f9ee66f262cb3d467 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9f644c62ce88ccaaab4698b6a17dd581 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4071af2dc460bef152beb896511b7773 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e978c73728e838b8f570e3b4153d016f |
| publicationDate | 1996-07-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H08184966-A |
| titleOfInvention | Radiation-sensitive resin composition |
| abstract | (57) [Summary] [Structure] (A) A polymer having a structural unit represented by the formula (1), (B) a compound that generates an acid upon irradiation with radiation, and (C) an acid having the formula (1). A radiation-sensitive resin composition containing a compound capable of crosslinking a polymer having a structural unit represented by: (In the formula, R 1 , R 2 and R 3 may be the same or different and each represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms, and X represents —OCO—, —CO—, —NR 4 CO—. , -S O 2 − or —OSO 2 — is shown, R 4 is a hydrogen atom or an alkyl group having 1 to 6 carbon atoms, and n is 1 Represents an integer of from 5 to 5. ). [Effect] The radiation-sensitive resin composition of the present invention has little change in the line width of the resist pattern due to the standing time after radiation irradiation or the PEB temperature, and has sensitivity, resolution, residual film rate, heat resistance, and storage stability. A chemically amplified negative resist having good properties can be provided. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7037994-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9469941-B2 |
| priorityDate | 1994-12-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 374.