| abstract |
(57) [Summary] [Constitution] A copolymer resin composed of phenols and dicyclopentadiene is used as an essential alkali-soluble resin component, A photosensitive resin composition further comprising a photoreactive component. [Effect] Phenol with low absorption around 248 nm The use of a dicyclopentadiene resin as an alkali-soluble resin provides a system for obtaining a resist pattern by using an excimer laser, particularly a KrF excimer laser, which can obtain higher sensitivity and higher resolution. |