http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0817924-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_294881271413951a95f284b588a68e66 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-52 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate | 1994-07-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_abb18267de8d0ec051743e91ff5649ad |
| publicationDate | 1996-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H0817924-A |
| titleOfInvention | Multilayer wiring forming method and multilayer wiring structure |
| abstract | (57) [Abstract] [PROBLEMS] To provide a multilayer wiring forming method and a structure for introducing a misalignment margin at the time of opening a connection hole without providing an overlapping portion on a lower layer wiring in an interlayer connection of the multilayer wiring. [Structure] After forming a first pattern by etching a part of the lower layer wiring 3 in the thickness direction, a sublimable side wall 9 made of a sulfur-based material is formed on a side surface of the mask 8 and the first pattern. The remaining portion in the thickness direction is etched to form a second pattern. The terrace portion 3T of the second pattern serves as a misalignment margin when the connection hole is opened. [Effect] Even if the alignment of the connection hole is deviated, the terrace portion T serves as an etching topper, and the insulating layer 2 is not damaged. Since the width of the terrace portion 3T is determined by self-alignment, the process is stable and the wiring density is highly integrated. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100436773-B1 |
| priorityDate | 1994-07-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.