http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H08175897-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J4-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B65B31-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate | 1994-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_164cd1b3fb5a2e3f2793a4a910986ad4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9040b1e434dfec3d973e6fc56f0b6bbf |
| publicationDate | 1996-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H08175897-A |
| titleOfInvention | Organometallic filling method |
| abstract | (57) [Summary] [Structure] When filling the subdivision container with the organometallic from the organometallic storage tank, the organometallic storage tank, the measuring instrument, and the subdivision container are connected to the atmosphere by a line, (1) A series of operations of vacuum suction → introduction of argon gas → vacuum suction of the container and the line are repeated at least two times or more to make a vacuum state, and (2) the weighed organic metal is put into a container for subdivision from a measuring instrument. Filling and closing the metering device outlet valve and the inlet valve of the subdivision container, and (3) the line connecting the measuring device and the subdivision container and the inlet valve of the subdivision container are not the same as those of the organic metal filling the subdivision container. A method for filling an organic metal, which comprises performing pressure washing with an active organic solvent, volatilizing and removing an organic solvent remaining in the line, and introducing an inert gas into the line. [Effect] Organizers are not required to have the skill level of workers, impurities such as oxygen are not mixed, and oxides of organometals are not attached to the nozzle of the subdivision container. It became possible to fill the subdivision container with organic metal from the storage tank. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008300712-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010222290-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10551004-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010123977-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108408261-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108408261-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9347616-B2 |
| priorityDate | 1994-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 60.