http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0815863-A

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assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d93502a23a72b56472bc75854cfe7c60
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
filingDate 1994-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ed46cbdbd0d8ac4257cd709c63d06989
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bdd0386368eaa2489f7fec1f162e0605
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a283e2a43d9c4d47966eaf41e56f4394
publicationDate 1996-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-H0815863-A
titleOfInvention Resist composition
abstract (57) [Summary] [Object] To provide a novel radiation-sensitive resist composition. A resist composition comprising a resin in which an acid labile group is introduced into polybenzyl etherified vinylphenol, which may optionally contain a vinylphenol unit or an ethylene unit, and an acid generator.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6329125-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008197480-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8614033-B2
priorityDate 1994-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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