http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H08137106-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d9cb217f83556ce2a418344c2d485415 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B5-20 |
| filingDate | 1994-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8f16665bc1472e6e4eaab41a757789c7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c918c1feeecec75e23e4746de76fdc5f |
| publicationDate | 1996-05-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H08137106-A |
| titleOfInvention | Pattern forming method using photosensitive polyamide |
| abstract | (57) [Summary] [Object] To provide a method for forming a pattern of a polyamide film excellent in heat resistance, insulating property, and colorless and transparent by developing a solution of a photosensitive polyamide in an aqueous solution. To aim. A polyamide film using a solution of a photosensitive polyamide composed of an aromatic amine component containing an aromatic diamine compound having a photosensitive group as a main component and an aromatic carboxylic acid component containing an aromatic tricarboxylic acid compound as a main component. To form The present invention relates to a pattern forming method, which comprises exposing the polyamide film to light in a predetermined pattern and then developing it with an aqueous solution containing a basic compound. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4647793-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002543223-A |
| priorityDate | 1994-11-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 111.