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publicationDate 1996-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-H08132260-A
titleOfInvention Laser processing method and liquid jet recording head manufacturing method using the same
abstract (57) [Summary] [Purpose] To avoid problems caused by laser processing by-products. [Structure] Base 1 such as a resin top plate of a liquid jet recording head 0 surface 10a is coated with a surfactant or the like to form a liquid protective film 1 2 is provided. A predetermined portion of the substrate 10 is irradiated with a laser beam A 1 such as an excimer laser to form a groove 11, and the by-product B 1 at this time is captured by the liquid protective film 12. The by-product B 1 can be removed only by lightly wiping the liquid protective film 12 after laser processing.
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006527477-A
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008078581-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012110964-A
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