http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H08129009-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1e8ba6870e42607109689c74072ca5d3 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N31-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-77 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N31-22 |
| filingDate | 1995-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d7313c0d8c5bb72f8872dab04b554ba5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_154b37a082a2a86cf2f876483b79176c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_44650558c287f974d8c8bfc6ca08c959 |
| publicationDate | 1996-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H08129009-A |
| titleOfInvention | Detection agent |
| abstract | (57) [Summary] [Purpose] A hydride gas such as arsine, phosphine, and silane contained in exhaust gas emitted from semiconductor manufacturing processes can be selectively detected with high sensitivity without being adversely affected by other gases. Develop a detection agent. [Structure] An inorganic carrier is loaded with molybdic acid or molybdate, preferably a mixture of molybdate and cupric salt, as a discoloring component to form a detection agent. |
| priorityDate | 1994-09-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 73.