| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_696ca0ae93d5cf5a686273601361781f |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-08 |
| filingDate |
1994-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_41df02d113192f1d1742806e6c0c1d80
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_43ef5be3634048f587f521c65d31a551
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_825c288e0e1c609ebf92f3a4ca2445f8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3855e629498cc901ccc433f6887f20bb |
| publicationDate |
1996-05-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H08124890-A |
| titleOfInvention |
Liquid filling method for concave structure space |
| abstract |
(57) [Summary] [Structure] After filling the concave structure space with a reactive gas in advance, a liquid that chemically reacts with the gas and dissolves is injected into the concave structure space. [Effect] It is possible to fill the liquid without leaving bubbles even inside the fine concave structure space where it is difficult to introduce the liquid due to surface tension or the like. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007067072-A |
| priorityDate |
1994-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |