| abstract |
(57) [Abstract] [Purpose] It is possible to easily and appropriately prevent the diffusion or deactivation of acid over time from the time of exposure to the heat treatment, and improve the dissolution inhibiting effect and developability to obtain a good profile and high resolution. To provide a positive photosensitive composition having [Structure] A resin that is insoluble in water and soluble in an alkaline aqueous solution, a compound that generates an acid upon irradiation with actinic rays or radiation, and a group that can be decomposed by an acid, and its solubility in an alkaline developer is increased by the action of the acid. A positive photosensitive composition comprising a low molecular weight acid-decomposable dissolution inhibiting compound having a molecular weight of 3,000 or less, and a resin having a basic nitrogen and a weight average molecular weight of 2,000 or more. |