| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5547f741b25666fc4ae5195cf71a979b |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67057
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05C3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05C3-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67023 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05C3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05C3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C22-73 |
| filingDate |
1994-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_95852797cbdb5b627740f39d5f46aa55 |
| publicationDate |
1996-05-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H08120462-A |
| titleOfInvention |
Wafer surface treatment equipment using chemicals |
| abstract |
(57) [Summary] [Purpose] To prevent the clogging of the filtration part and to efficiently perform the surface treatment on the wafer. [Structure] An overflow-type processing bath 1 for performing a surface treatment on a wafer 4 which is filled with a chemical liquid 3 and immersed in the chemical liquid 3, and an outer bath 2 for receiving the chemical liquid 3 overflowing from the processing bath 1 are pipes. 7 communicate with each other. A pump 5 and a filter unit 6 are provided in the pipe 7, which circulates the chemical liquid 3 and filters foreign substances in the chemical liquid 3. The filtration unit 6 is provided with a second temperature adjustment mechanism 20 that adjusts the temperature of the filtration unit 6 to a temperature at which a deposit is not generated from the chemical liquid 3, and clogging of the filtration unit 6 due to the deposits is prevented. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6357458-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2006507404-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6241827-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2018133558-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019206729-A |
| priorityDate |
1994-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |