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filingDate 1994-10-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 1996-05-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-H08118630-A
titleOfInvention PRINT HEAD FOR INKJET PRINTER AND METHOD OF MANUFACTURING THE SAME
abstract (57) [Abstract] [Purpose] A bamorph type piezoelectric member is provided on the side wall of a pressurizing chamber easily and with high accuracy. [Configuration] The print head 1 includes an ink reservoir 201 on the front and back surfaces, Pressurization chamber 202, ink flow path 204 and ink ejection path 20 A diaphragm 3 made of a titanium plate is bonded to a substrate 2 in which a concave portion that forms part 3 is formed. On the outer surface of the vibrating plate 3 facing the pressurizing chamber 202, two PZTs whose polarization directions are opposite to each other are formed between the electrode 6 and the vibrating plate 3 by a hydrothermal synthesis method. The bimorph type piezoelectric element 4 is formed by depositing 41 and 42. The electrode 6 and the diaphragm 3 are made of a titanium plate, and the PZTs 41 and 42 are deposited on the electrode 6 and the diaphragm 3 to form the piezoelectric element 4, so that the bimorph type piezoelectric element 4 can be formed easily and with high accuracy. I chose
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