| abstract |
(57) [Summary] [Constitution] According to the present invention, a predetermined device (2, 4, 6) such as a cooling device is passed from a main pipe (17) for transporting a low temperature fluid such as liquid nitrogen to a branch pipe (18, 19). In the piping equipment for supplying the low temperature fluid, the branch pipes (18, 19) are characterized by using heat insulating pipes having a small outer diameter. [Effect] In this way, the branch pipe (18, 1 By reducing the diameter of 9), the space occupancy rate can be reduced, and the space (3, 5) in which it is installed can be effectively used. Further, by reducing the diameter of the branch pipes (18, 19), it is possible to reduce the amount of low-temperature fluid that wasted in the past. |