http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0779120-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B7-345 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B21-30 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B21-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B7-34 |
| filingDate | 1992-08-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1995-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H0779120-B2 |
| titleOfInvention | Controlling large-scale topography on silicon wafers |
| priorityDate | 1991-10-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541 |
Total number of triples: 16.