http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0775739-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e5db580deca7130dbe51805c6c608b35 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01L7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F25D21-04 |
| filingDate | 1993-09-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_850857f2fae4d8a44f2a4c594ba0a162 |
| publicationDate | 1995-03-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H0775739-A |
| titleOfInvention | Cooling system |
| abstract | (57) [Abstract] [Purpose] Regarding a cooling device used for temperature cycling of semiconductor devices, etc., to prevent the formation of frost in the test chamber, eliminating the work required to remove the frost that was necessary with conventional technology. A cooling device is provided. [Structure] Low temperature chamber 11 and test chamber 3 consisting of heat insulating container 10 In the cooling chamber consisting of 1, the nitrogen container 18 and the nitrogen introducing pipe 1 7 and the nitrogen flow rate control valve 16 to introduce nitrogen, and the atmosphere in the cooling chamber is changed to air or nitrogen having a low thermoconductivity and a high nitrogen concentration. The temperature drop is delayed to prevent frost from forming in the cooling chamber or members in the cooling chamber. In this case, when introducing a gas having a lower thermal conductivity than air into the cooling chamber, liquid nitrogen can be used, or adiabatic expansion can be performed to utilize the cooling effect. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108387055-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4711067-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007155460-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104646078-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106766300-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103394378-A |
| priorityDate | 1993-09-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419556970 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID947 |
Total number of triples: 21.