http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0763668-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f97f0fa258a008bf056ad04b7f380dda |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J3-433 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-00 |
| filingDate | 1993-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4016f8ba0655262b3a0709a27a9d1b9d |
| publicationDate | 1995-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H0763668-A |
| titleOfInvention | Compound composition ratio measuring device |
| abstract | (57) [Summary] [Objective] In semiconductor manufacturing, without compromising the ion implantation step, diffusion step, etc., and without damaging the sample, the compound semiconductor composition ratio can be obtained accurately by modulation spectroscopy. [Structure] White light (probe light) P is irradiated to a portion of the sample 5 irradiated with the modulated excitation light L to detect a reflection spectrum. There is a correlation between the absorption edge energy obtained from this reflection spectrum and the composition ratio of the compound semiconductor, and the composition ratio of the compound semiconductor is detected from the calibration curve using known data. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9086321-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103363909-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2014063982-A |
| priorityDate | 1993-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID28718 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419513094 |
Total number of triples: 17.