http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H075682-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d93502a23a72b56472bc75854cfe7c60 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-023 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-028 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-033 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 1993-11-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c89eaa7475feef006be6c32832b1cf91 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bdd0386368eaa2489f7fec1f162e0605 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f97d0948b3670022f2afc28e8e78560b |
| publicationDate | 1995-01-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H075682-A |
| titleOfInvention | Resist composition |
| abstract | (57) [Summary] [Objective] To provide a resist material having excellent resist properties such as sensitivity, resolution, etching resistance, and storage stability. A resist composition comprising a copolymer having a structural unit represented by the following general formulas (I) and (II) in the molecular chain and a 1,2-naphthoquinonediazide compound. . [Chemical 1] In the formula, R 1 and R 2 are the same or different from each other and are a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, a substituted alkyl group having 1 to 5 carbon atoms, a halogen atom or a cyano group, and R 3 Is linear acetal group, cyclic acetal group, a carbonate group, or -OR 4. [Chemical 2] In the formula, R 5 is a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, A substituted alkyl group having 1 to 5 carbon atoms, a halogen atom, or a cyano group, and R 6 is -COOR 7 (provided that R is 7 is a hydrogen atom, a C1-C6 alkyl group, or a C1-C6 substituted alkyl group. ), A phenyl group containing a hydroxyl group, or a phenyl group containing a cyano group. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100744330-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-03029901-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6756178-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6737213-B2 |
| priorityDate | 1993-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 207.