| abstract |
(57) [Abstract] [Purpose] To provide a probe device capable of performing highly accurate electrical measurement even when a high frequency pulse is used. [Structure] A ring-shaped aluminum block body 5 is bonded to the probe card 4 so as to cover the peripheral portion on the upper surface side of the probe card 4, and a large number of through holes 51 extending in the thickness direction are formed in the block body 5. Forming and through hole 51 The conductor shaft 52 is inserted through the insulator 54 into the conductor shaft 5 The lower end of 1 is projected to the lower surface side of the probe card 4. Similarly, the block body 7 is also joined to the wiring board 61 on the test head 6 side, the conductor shaft 72 and the insulator 74 are provided, and the block bodies 5 and 7 are joined to each other to form the insulator 5 The complete coaxial structure is obtained by fitting the 4, 74 parts together and the conductor shafts 52, 72 together. |