http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0745681-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9d5ebd9bdc11f7a4b267d7e865d5a84f |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 1993-08-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1e58a15c2506d76045e5c3f5e3fb7dde http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a532d9661214b12763f6a7371d575e9c |
| publicationDate | 1995-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H0745681-A |
| titleOfInvention | Sample cross-section observation method |
| abstract | (57) [Abstract] [Purpose] The purpose is to observe the cross section of the floating wiring of a semiconductor integrated circuit neatly with a charged particle beam without charging up. [Structure] In order to form a cross section of a floating wiring of a semiconductor integrated circuit, a focused ion beam is applied to the cross section at 1 One side is formed and a concave portion is formed by repeatedly scanning and irradiating. Next, a second concave portion is similarly formed in the sample at a position adjacent to the cross-sectional portion with a distance of 0.2 to 100 μm. A metal film is formed by repeatedly irradiating a focused ion beam on the cross section of the second recess adjacent to the observed cross section while spraying the organometallic compound vapor. Next, the observation cross section is irradiated with a focused ion beam or electron beam while scanning, secondary charged particles generated by the irradiation are detected, and an image of the cross section is displayed. [Effect] Since the cross section of the floating wiring to be observed is electrically connected to the metal film formed on the back surface of the floating wiring, there is no charge-up, and the focused ion beam or electron beam is emitted while scanning to form an image. It can be taken cleanly. |
| priorityDate | 1993-08-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419524206 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID98885 |
Total number of triples: 13.