http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0743534-B2
Outgoing Links
| Predicate | Object |
|---|---|
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-022 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-30 |
| filingDate | 1989-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1995-05-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H0743534-B2 |
| titleOfInvention | Method of manufacturing resist pattern for semiconductor device |
| priorityDate | 1989-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 51.