http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H07333838-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e5db580deca7130dbe51805c6c608b35 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d93502a23a72b56472bc75854cfe7c60 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-012 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0048 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-012 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 1994-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3046df747fbfe81214ebccaad6706adb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1438d4ebe07410fe1ef4b58d97161e07 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c25fe00cfe5e7fd7c5f2fa5eaa8cda8f |
| publicationDate | 1995-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H07333838-A |
| titleOfInvention | Rubber type photoresist composition |
| abstract | (57) [Abstract] [Purpose] A rubber-based photoresist composition mainly composed of cyclized rubber, which is capable of providing a uniform coating film thickness even when applied to a large substrate or a rectangular mounting substrate by spin coating. The object is to realize a photoresist composition. A rubber-based photoresist composition mainly composed of a cyclized rubber, characterized in that the solvent contains a solvent having a boiling point range of 150 to 220 ° C. When the rubber-based photoresist composition is dropped on the substrate 1 while rotating the substrate 1 at a high speed using a spinner, A thin film of the rubber-based photoresist composition is uniformly formed on the surface of the substrate. |
| priorityDate | 1994-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 43.