http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H07331444-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7c5a4ae81822d214a07bf55ad61bd1cf |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-515 |
| filingDate | 1995-04-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4e7434c7fa64bed0f73d72c9923078ee http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7829485ce0c0fd6fa61a8cc9f96ed081 |
| publicationDate | 1995-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H07331444-A |
| titleOfInvention | Ferroelectric film forming method and apparatus |
| abstract | (57) [Summary] [Purpose] It is possible to avoid high-temperature film formation, in which the film quality is deteriorated or a large amount of film forming raw material is required, and it is difficult to control the film thickness uniformity. And a device for forming a ferroelectric film capable of reliably controlling the film formation, suppressing the generation of particles that deteriorate the film quality, and capable of forming a film without significantly reducing or improving the film formation rate. I will provide a. [Structure] A raw material gas for film formation is turned into plasma by applying high-frequency power, and a substrate is exposed to this plasma to form a ferroelectric film on the base. Using a gas of an organic compound containing the constituent elements of the target ferroelectric film and a heterogeneous gas containing an oxygen element, plasma of the source gas is converted into basic high-frequency power of a predetermined frequency of 10 MHz or higher at a frequency of 1000 minutes. This is performed by applying high frequency power in a state where amplitude modulation is performed at a modulation frequency in the range of 1 or more and 1/10 or less. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2013105832-A |
| priorityDate | 1994-04-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 45.