http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H07300392-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3593a13cc4ab7079f7a69ef885b5a005 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-14 |
| filingDate | 1994-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_06ff85dadc126f7023b439ab2cf166ee http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2af4b40eac3d4641ea11733aeb492d2d |
| publicationDate | 1995-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H07300392-A |
| titleOfInvention | Gas cell for thin film forming equipment |
| abstract | (57) [Abstract] [PROBLEMS] To provide a gas cell for a thin film forming apparatus capable of achieving uniform film thickness of a thin film formed on a substrate with a simple structure. [Structure] An expanding portion 1 at a tip of a gas ejection portion 12 for ejecting a raw material gas, the diameter of which is gradually increased in the ejection direction of the raw material gas. Gas cell provided with 3. |
| priorityDate | 1994-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 15.