| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_669c01133740c5233f2c8738904ea3af |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-32 |
| filingDate |
1994-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_16a2d719653410984711fd8dba1e28c4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9b901326979d3e1b4690edcb5a5145e6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5cb9d858ce511c51eb9b4c0d4b945ee3 |
| publicationDate |
1995-11-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H07295203-A |
| titleOfInvention |
Method for manufacturing blanks for halftone phase shift photomask |
| abstract |
(57) [Summary] [Objective] To obtain a blank for a halftone phase shift photomask, which has a sufficient transmittance for short wavelength light and can be used in high resolution lithography. [Structure] At least one layer of a layer mainly containing a chromium fluoride compound is formed by depositing chromium evaporated or sputtered from metallic chromium or a chromium compound in a plasma generated from a gas containing a fluorine atom on a transparent substrate. A blank for a halftone phase shift photomask is obtained by forming the above. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001056544-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-4505670-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H09244212-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2011227518-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100499303-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20010070403-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100719640-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005099707-A |
| priorityDate |
1994-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |