http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H07294596-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_02685f435ae35c3a5eb2ea82515b8eed |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 1994-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c6029d728fd8e5e306cbd84e198455d2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4485626ed20b4ce601a145124fd3ac14 |
| publicationDate | 1995-11-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H07294596-A |
| titleOfInvention | Temperature control method in constant temperature bath for high and low temperature handler |
| abstract | (57) [Summary] [Purpose] To provide a high-speed and stable temperature control method for a constant temperature bath for high and low temperature handlers. [Constitution] The constant temperature bath 1 contains a preheating unit 2A for heating an IC and a measuring unit 2B. When the inside of the constant temperature bath 1 is heated to a high temperature, the heater 1A is heated and the fan 1B causes hot air to circulate in the bath. When the temperature inside the constant temperature bath 1 is lowered, liquid nitrogen is introduced into the bath and the fan 1B circulates cold air inside the bath. The temperature sensor 3A is arranged at a position apart from the source of the target temperature, and the temperature sensor 3B is arranged near the source of the target temperature. The temperature sensor 3A rapidly controls the temperature inside the constant temperature bath, and when the target temperature is reached, the temperature detection is switched to the temperature sensor 3B to stably control the temperature inside the constant temperature bath 1. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100502053-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100499909-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008032397-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100711623-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6593761-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2008064368-A |
| priorityDate | 1994-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID947 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419556970 |
Total number of triples: 20.