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filingDate 1994-04-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_37da9f3b573604392f3d6faeeadcccc8
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publicationDate 1995-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-H07287001-A
titleOfInvention Method and apparatus for analyzing impurity gas in fluorine gas
abstract (57) [Abstract] [Purpose] To provide a method for easily and accurately analyzing an impurity gas in fluorine gas. [Structure] Fluorine gas containing an impurity gas is passed through a metal fluoride packed layer to fix and remove the fluorine gas, and then analyzed by gas chromatography.
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