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filingDate 1995-02-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_de3e27946dc8171a2b588826037f4bde
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publicationDate 1995-10-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-H07283280-A
titleOfInvention Connection device and manufacturing method thereof
abstract (57) [Abstract] [PROBLEMS] To provide a connecting device having a contact terminal capable of contacting an inspection object at multiple points and at high density, and a method for manufacturing the same. [Structure] A hole serving as a mold for forming the contact terminal 103 is formed by anisotropic etching of a silicon wafer, and the contact terminal 103, an insulating film 104 made of a polyimide film, and a lead wire are formed by using this mold. 105 To form. Further, the insulating film 104 and the wiring board 1 07 and the silicon wafer to be the buffer layer 108 and the substrate 109 are sandwiched and integrated, and the mold is removed. After that, the lead-out wiring 105 is connected to the electrode 110 a of the wiring board 107 with the solder 111.
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