http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H07283215-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c5520dd38cc403678d9f91e0b0ee95fb |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B6-13 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205 |
| filingDate | 1994-04-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b81be1f2fcdc2383ae411b9fa70b6c3f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_18811f6655aa61ce34d512001e6064f4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a3b18d3b6b5a0cb3c137dea37fb4e83e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e9f156130d57de966108c76aa5eb6c86 |
| publicationDate | 1995-10-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H07283215-A |
| titleOfInvention | Method for manufacturing optical integrated circuit |
| abstract | (57) [Abstract] [Purpose] An optical integrated circuit is manufactured at a high yield, efficiency, and cost by simple mask alignment. [Structure] A first photoresist 306 is coated on the optical waveguide, and a microguide 201, a waveguide lens 202, The area where the optical demultiplexer 203, the phase shifter 204, and the two mirrors 205 and 206 are formed is exposed and removed. The upper cladding layer 103 of SiO 2 is etched and removed using the first resist film 306 left as a pattern as a mask. A second photoresist 30 is newly formed on the substrate. 7 is applied, and the microguide 201 and the waveguide lens 20 are applied. 2. The region 207 including the regions where the optical demultiplexer 203 and the phase shifter 204 are formed is left, and the other regions are exposed and removed. Using the second resist film 307 and the first resist film 306 left after patterning as a mask, S i 3 N 4 core layer 102 and SiO 2 lower cladding layer 101 Are removed by etching. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100441242-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6756319-B2 |
| priorityDate | 1994-04-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.