http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H07281430-A
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_03d0f52bb4069f8a19d70dcfb697c67a |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0236 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-023 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-022 |
filingDate | 1994-04-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e4eb526dd1ede469835cc80c2e01abf2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_45c252583cde8d06ccecefeda60d1649 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_82d2e7bd7d775c3e6365dd10d40840a1 |
publicationDate | 1995-10-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-H07281430-A |
titleOfInvention | Positive photoresist composition |
abstract | (57) [Abstract] [Objective] Especially in the manufacture of semiconductor devices, it has a high resolution, accurately reproduces mask dimensions over a wide range of photomask line width, and has a high aspect ratio in a pattern with a line width of 1 μm or less. A positive-type resist pattern that can generate a resist pattern having a cross-sectional shape, can generate a pattern in which the side wall of the pattern cross-section is nearly vertical, has a wide development latitude, and has a resist image having excellent heat resistance. Provided is a photoresist composition. In a positive photoresist composition containing an alkali-soluble novolac resin and a 1,2-quinonediazide compound, the alkali-soluble novolac resin is at least one of phenols represented by the following general formula (1). A novolak resin obtained by condensing a mixture containing a seed and at least one kind of the compound represented by the general formula (2) with an aldehyde. [Chemical 1] |
priorityDate | 1994-04-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 407.