abstract |
(57) [Summary] (Modified) [Objective] Since the synthetic quartz glass member obtained by the manufacturing method of the present invention has both OH group content and chlorine content free, It is an object of the present invention to provide a method for producing a synthetic quartz glass member that is equivalent or better. [Structure] The method for producing a synthetic quartz glass member according to the present invention comprises crushing and sieving synthetic quartz glass, and then applying vacuum. After heating at 1,000 to 1,200 ℃, raise the temperature to 1,500 to 1,900 ℃ It is characterized by being melted at. |