http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H07263364-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6b822ee046eb6c45d1e3bd9ce9c1782e |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-54 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 |
| filingDate | 1994-11-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_21747acfb77b0d181ab4dff0d66658d4 |
| publicationDate | 1995-10-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H07263364-A |
| titleOfInvention | Plasma gas phase reaction method |
| abstract | (57) [Summary] [Purpose] To form a film with a uniform thickness. A substrate is disposed between a pair of electrodes and has a floating potential with respect to the electrodes, the pair of electrodes is connected to one end and the other end of a matching coil, and the middle point of the matching coil is connected to a ground level. The voltage applied to each of the pair of electrodes is placed symmetrically with respect to the ground level. |
| priorityDate | 1994-11-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.