| abstract |
(57) [Summary] [Structure] a) A water-soluble compound that generates an acid upon irradiation with light or ionizing radiation, and b) At least one water-soluble compound having a repeating unit represented by the following formulas (1) and (2). Water-soluble photosensitive composition containing a water-soluble polymer, a) a water-soluble compound that generates an acid upon irradiation with light or ionizing radiation, and b) a polyvinyl alcohol copolymer, wherein the content of metal ions is all solid 1 for minutes A water-soluble photosensitive composition having a concentration of 000 ppm or less. Contains. [Chemical 1] (Here, R 1 represents a hydrogen atom or a monovalent organic group.) [Effect] It can be developed with water without using an organic solvent, and has sufficient sensitivity for use as a resist without using a harmful substance. Have. Therefore, it is safe for human body and does not pollute the environment. |