http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H07240443-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b55c349b43c3ecba4977fd52cc8f8c67 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L79-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R1-073 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-3432 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
| filingDate | 1994-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_84f3c46fde0c3a9d5b77af511f95b8e1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_119212de445f2726a4f0a62bf76a127d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_59d1a0ed403ed77002c27dc5ecf9f7ea |
| publicationDate | 1995-09-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H07240443-A |
| titleOfInvention | Probe structure and manufacturing method thereof |
| abstract | (57) [Summary] According to the present invention, a conductor layer 1 and an insulating coating layer 3 are laminated in this order on an insulator layer 2, and contact with an object to be inspected, which is conducted with the conductor layer 1. Part 4 is provided on at least one side, and the thickness of the coating layer 3 is 0.1 times that of the insulator layer 2. ˜5.0 times, and the linear expansion coefficient of the coating layer 3 is 0.5 to 1.5 times the linear expansion coefficient of the insulator layer 2 and a method for producing the same. [Effect] It is possible to obtain a probe structure in which the base material is less likely to warp and a conduction test can be performed more reliably. |
| priorityDate | 1994-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 45.