| abstract |
(57) [Summary] [Structure] Two types of organic groups having a polyamic acid ester chemical structure and having an ester bond, that is, a hydrocarbon group having 3 or less carbon atoms and a group having a terminal ethylene bond having 4 or more carbon atoms. And a photosensitive composition containing the same. [Effects] A high-resolution polyimide pattern is obtained from the above-mentioned precursor, and this polyimide has a high degree of elongation, excellent adhesion to a substrate, high water resistance, and low residual stress. |