http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H07232998-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5198a2a21392d6cbc0bb4898b3fb3d29 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B3-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J19-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H03H9-25 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-38 |
| filingDate | 1994-02-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_31102ec4928e557e0e14426f8dac0a58 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d625d1647650c54f8a1df2eac8d2fd38 |
| publicationDate | 1995-09-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H07232998-A |
| titleOfInvention | Dielectric material and manufacturing method thereof |
| abstract | (57) [Abstract] [Purpose] An object is to obtain a dielectric element, a piezoelectric element, an optical element, or the like, which effectively utilizes the crystal axis anisotropy without restriction on the type of substrate. [Composition] Silicon and glass whose surface is naturally oxidized, A dielectric material in which an aluminum nitride polycrystal film in which a c-axis is perpendicular to the surface and a and b-axes are aligned with each other is formed on the surface of a substrate whose surface is amorphous. And, a manufacturing method characterized by irradiating the surface of the substrate with particles having a kinetic energy of 10 to 100 eV when manufacturing this material. [Effect] By irradiation of particles during film formation, an aluminum nitride polycrystal film in which crystal axes are oriented with respect to each other can be obtained, which makes it possible to obtain an element that effectively utilizes the crystal axis anisotropy of the material. . |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020088281-A |
| priorityDate | 1994-02-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.