http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H07230164-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-022 |
| filingDate | 1994-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2f7dd25f28318bbb719403b5297fe6fc http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_453c6fdaed56c72c830d0a3ef8ac4dc1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7f08ea87295ed56b59dae70df070c234 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_570594917b2befdc87476b2702101249 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8fffc9ab1d382ccfd1a59ccc5eb62349 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4d1a0527009e3d4221e730ccf8a30ffa |
| publicationDate | 1995-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H07230164-A |
| titleOfInvention | Positive resist composition |
| abstract | (57) [Summary] [Structure] An alkali-soluble resin and a quinonediazide group-containing compound are dissolved in a mixed solvent of L (+)-type alkyl α-oxypropionate or another organic solvent mainly containing it. Is a positive resist composition. The organic solvent preferably has a viscosity of 1 centipoise or less at a temperature of 20 ° C. or a combination thereof with a hydrocarbon-based organic solvent. [Effect] It is possible to form a coating film in which the solubility of the photosensitizer is high, the photosensitizer does not precipitate, the storage stability is excellent, the coating property and the conformal property are excellent, and the sensitivity does not change with time. It is safe, highly safe, and has no adverse effects on the environment or the human body. |
| priorityDate | 1994-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 146.