| abstract |
(57) [Abstract] [Purpose] To provide a probe that can sufficiently support product testing of highly integrated electronic circuits. A comb piece 3 is formed by cutting slits 3'on one side of a thin plate 2 of a flexible insulating material at a pitch corresponding to the arrangement pitch of object terminals. Next, the measurement terminal 4 is provided at the tip of each comb piece 3, and the measurement terminal 4 is provided with an arbitrary position on the thin plate 2, for example, a connector electrode 6 provided at a position opposite to the measurement terminal 4. Further, a lead 5 for connecting the measurement terminal 4 and the connector electrode 6 is formed by conductor patterning by photolithography. |