http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H07199139-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4c749869ceec0bf9233246d8dd843321 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-136 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1368 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-13 |
filingDate | 1993-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a2a59a6c85e10c89171df841854f859 |
publicationDate | 1995-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-H07199139-A |
titleOfInvention | Method and apparatus for inspecting liquid crystal substrate |
abstract | (57) [Abstract] [Purpose] To provide a highly reliable liquid crystal substrate inspection method and apparatus. [Structure] The mounting table 2 is configured to be movable in the Z and θ directions with respect to the movable base 21, and the movable base 21 is movable in the X and Y directions by an X base 41 and a Y base 51, respectively. There is. On the other hand, the probing substrate 6 is fixed to the fixed table, and the contact between the probing needle 62 and the electrode pad 31 of the liquid crystal substrate 3 on the mounting table 2 is performed by moving only the mounting table 2. Between the X base 41 and the Y base 51, and the X base 4 FPC cables 44 and 54 formed by applying printed wiring to a flexible insulating strip are used as cables between the movable base 21 and the movable base 21. The liquid crystal substrate 3 or the glass substrate 30 including the liquid crystal substrate 3 is provided with at least two marks 32A and 32B, and one TV camera sequentially observes the marks 32A and 32B to detect the θ angle of the liquid crystal substrate 3. To do. |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100443474-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101032142-B1 |
priorityDate | 1993-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 19.