| abstract |
(57) [Abstract] [Purpose] A small and highly accurate acceleration sensor is constructed by increasing the effective area of the fixed and movable parts of the acceleration sensor. [Structure] Each fixed part 24, movable part 26 and guard 32 An acceleration sensor is formed by the first sensor portion 22 having the same shape and the second sensor portion 22 'located on the upper side and having the same shape. Each fixing portion 24, 24 'and supporting portion 27, 27 'is joined with a conductive adhesive, and guards 32, 32' Are bonded with an adhesive. Thereby, the mass parts 29, 29 ' Can be displaced with respect to the beams 28 and 28 ', and the acceleration sensor can secure an effective area twice as large as the effective area of the electrode serving as the detection portion. |