http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H07166356-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c1755eede76ea7e719a3e0d2843cd793 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 |
| filingDate | 1993-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6796cafdfd81174f5651366102a7d0c1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3283e80f267944e980991959fac76fe8 |
| publicationDate | 1995-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H07166356-A |
| titleOfInvention | Substrate surface treatment method |
| abstract | (57) [Summary] [Object] To provide a substrate surface treatment method capable of efficiently supplying a reaction gas to a substrate surface and simultaneously performing front and back surface treatment of the substrate with a small amount of gas used. A first solid dielectric 6 having an opening 6a is provided on one surface of the first porous metal electrode 3, and a second porous metal electrode 4 is provided so as to face the first solid dielectric 6. The first and second porous metal electrodes are capable of supplying a reaction gas, and the side surface between the first solid dielectric 6 and the second porous metal electrode 4 is covered with the second solid dielectric 8. In the plasma generator which is regarded as a closed space, the substrate 7 is installed so as to divide the space into at least two parts, and an inert gas and a reaction gas are supplied to the substrate 7, and the pressure near the atmospheric pressure is set. Glow discharge plasma is generated below to bring the excited active species into contact with the front and back surfaces of the substrate 7 at the same time. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0240742-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5954926-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007109446-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107750085-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010212028-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2019090108-A |
| priorityDate | 1993-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 38.