http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H07165493-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3b96fcd27eca0c8082a6473515811a00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-27 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50 |
| filingDate | 1994-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c99bf0360ec061582e6c7f6def85d28b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_59e37ea0f20514b9ef9fdd09f917155b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_957af0e9285249ad618bb42530b7b92b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4d13a29ae79dda44bc1ab0c924fa1728 |
| publicationDate | 1995-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H07165493-A |
| titleOfInvention | Diamond film manufacturing method |
| abstract | (57) [Summary] [Object] To provide a method for producing a diamond film, which has a high source gas division ratio and therefore can efficiently form a high-purity diamond film. According to the present invention, a raw material gas composed of hydrogen gas and a hydrocarbon gas or an organic compound gas is passed between the electrodes 1 and 2 facing each other together with a Group 0 gas of 30 to 90 vol%. The diameter of the positive electrode 1 is larger than that of the negative electrode 2. Then, the raw material gas is also passed between the electrodes 1 and 2, and a DC voltage lower than 100 V is applied to the opposing electrodes 1 and 2 to generate an arc discharge column, Deposit and form a diamond film. In particular, by setting the diameter of the positive electrode 1 to be larger than the diameter of the negative electrode 2, it is possible to widen the plasma portion due to arc discharge and more efficiently synthesize diamond. |
| priorityDate | 1994-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 20.