http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H07159293-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_294881271413951a95f284b588a68e66 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-73 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-31 |
| filingDate | 1993-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_97d68ccc735487993e3b34fe9cbcc508 |
| publicationDate | 1995-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H07159293-A |
| titleOfInvention | Surface analysis method and surface analysis apparatus |
| abstract | (57) [Summary] [Objective] It is an object of the present invention to provide a surface analysis method and a surface analysis apparatus capable of obtaining highly reproducible and highly reliable measurement results. [Structure] In the first step (1), a droplet 31 of a recovery liquid 3 made of a hydrofluoric acid solution is formed on a sample 1 made of a silicon wafer. In the second step (2), the tip of the sample collection tube 21 is moved in contact with the droplet 31 to scan the droplet 31 on the upper surface of the sample 1, and the sample 1 is placed in the droplet 31. Collect surface contaminants. In the third step (3), the droplet 31 of the recovery liquid 3 is collected from the tip 211 of the sample collecting tube 21 into the sample collecting tube 21. Fourth step (4) Then, from the tip 211 of the sample collection tube 21 to the analysis means 22 The recovery liquid 3 is directly injected into the sample, and the pollutants recovered in the recovery liquid 3 are analyzed by the analysis means 22. by this, The recovery liquid 3 in which the pollutant was recovered was injected into the analysis means only through the sample collection tube. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8486703-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8637813-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2012519847-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9063047-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012045077-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010101656-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9395278-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8519330-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9779926-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009253271-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8080113-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9146180-B2 |
| priorityDate | 1993-12-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 34.