| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fd446fb0d73aa96d044fea2eaa3c8ebc |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-96 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P15-0802 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F16C33-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F16C23-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3063
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P15-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F16C11-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 |
| filingDate |
1994-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d9806a5d42c29ab90b45f8efd3b2fa85
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_189df1f808b854c8c4c93d1833acc89b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_46a7fd8f278d08463f30e591e55b9644
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1f3a64cb3e962ca11dabafae62fb542f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e1913b5a6392a671d65256ffd3dde956
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fa437d38b4f3703ae0497fd945cd027d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f5f548e4d3f8baacada909cb1eefe876
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_144bec259d5cbdbb66242efa730d5328 |
| publicationDate |
1995-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
JP-H07153973-A |
| titleOfInvention |
Manufacturing method of micromechanical component |
| abstract |
(57) [Abstract] [Purpose] To fabricate micromechanical components that can be integrated together with bipolar circuit elements. Structure: A groove defining a structure is formed in one silicon layer, and the structure is under-etched in another step. A selective anodization of silicon is used for this under-etching. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H09119912-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007525330-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2009065042-A |
| priorityDate |
1993-09-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |