http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H07147407-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be055db3c1a09879df07379ba969e223 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78 |
| filingDate | 1993-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8179abc124774a05d1bdc3077157b794 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c8501f03c1a444138651ca83aea235fa http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aa3e837ba2fb9cab1889773525bda930 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6c4b7107c40ec424a6b284ac723eb485 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d5947de83926c14a875a3986c97009b4 |
| publicationDate | 1995-06-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H07147407-A |
| titleOfInvention | Thin film transistor element and manufacturing method thereof |
| abstract | (57) [Abstract] [PROBLEMS] To provide a thin film transistor element capable of achieving the hydrofluoric acid resistance and the withstand voltage of a first insulating film, and a method for manufacturing the same. [Structure] A first electrode 2 formed on an insulating substrate 1, and Two or more first layers including a pressure resistant layer and a hydrofluoric acid resistant layer formed on the surface of the first electrode 2 by anodic oxidation. Of the insulating film 3, a second insulating film 4 formed on the first insulating film 3 by means other than anodic oxidation, and a channel stopper layer 6 formed on the second insulating film 4. The semiconductor layer 5 and the second electrode 7 formed on the semiconductor layer 5 are provided. |
| priorityDate | 1993-11-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.