abstract |
(57) [Summary] [Purpose] A heat-resistant positive electrode which can sufficiently support any structure of a polyimide precursor having photosensitivity, and has excellent sensitivity and resolution, and particularly excellent storage stability in a solution state. Provided are photoresist compositions. [Structure] A polyimide precursor having an oxymethyl group having a specific structure introduced as a protecting group for a carboxyl group, A composition comprising a photo-acid generator. By irradiating with actinic rays such as ultraviolet rays, the oxymethyl group as a protective group is eliminated, the solubility of the polyimide precursor is increased, and a positive pattern can be formed. In addition, the acid generated can be neutralized by adding the thermal base generator together, and the strength of the obtained film is improved. |