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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
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filingDate 1993-07-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f912a1a5acd1fd911180f630af79bbc9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_15921f3d1cb0f627955d8fc05e682028
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publicationDate 1995-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber JP-H07134414-A
titleOfInvention Heat resistant positive photoresist composition
abstract (57) [Summary] [Purpose] A heat-resistant positive electrode which can sufficiently support any structure of a polyimide precursor having photosensitivity, and has excellent sensitivity and resolution, and particularly excellent storage stability in a solution state. Provided are photoresist compositions. [Structure] A polyimide precursor having an oxymethyl group having a specific structure introduced as a protecting group for a carboxyl group, A composition comprising a photo-acid generator. By irradiating with actinic rays such as ultraviolet rays, the oxymethyl group as a protective group is eliminated, the solubility of the polyimide precursor is increased, and a positive pattern can be formed. In addition, the acid generated can be neutralized by adding the thermal base generator together, and the strength of the obtained film is improved.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2020033460-A
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