http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H07113171-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d9cb217f83556ce2a418344c2d485415 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-35 |
| filingDate | 1993-10-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f0515d44ab6e7a258879ff19848abcae http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9ac26fcdf1344ce786a9e8bb1d87e7b0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9f02fdd964048cd0dcd037870bcbfa6f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e85da10dd368cd2f8ca58ee80124d9fc |
| publicationDate | 1995-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H07113171-A |
| titleOfInvention | Sputtering method for titanium ceramics film |
| abstract | (57) [Summary] [Purpose] Two different types of ceramic coating films were laminated on the surface of a die-casting die whose base material was an iron-based material to improve heat resistance and prolong life. An object of the present invention is to provide a sputtering method for obtaining a die-casting mold easily and with high efficiency. [Structure] A Ti layer is first formed on the surface of a die casting mold by switching the position of the target plasma generated during film formation by controlling the magnetic field in the cathode using a target having a TiAl material in the center and a Ti material in the outer periphery. Coating, then T The iAlN layer film is formed. When the TiAlN layer is formed, a substrate bias voltage is applied to the mold to improve the film quality by the ion assist effect. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0603486-A2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0603486-A3 |
| priorityDate | 1993-10-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.