http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H07104469-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_24aca9ded2638ea793d05360dde7a4a0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F290-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G8-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F299-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F16-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-028 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 |
| filingDate | 1993-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_20881166c015754eb567ef04b86c2daf http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4fcbf945a793947a065d2edf522fbffe http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_082769664972dd9b0248dc1d23b72a9e |
| publicationDate | 1995-04-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H07104469-A |
| titleOfInvention | Negative photoresist resin composition |
| abstract | (57) [Summary] (Modified) [Purpose] While maintaining the same fast-curing properties and cured physical properties as conventional acrylate resins, polymerization is not hindered by oxygen and good surface curability is achieved. Provided is a negative photoresist composition having excellent photoresist characteristics such as sensitivity, high resolution, and developability in a dilute alkaline aqueous solution. [Constitution] (1) Formula (I) [N is 0 to 20, R 1 and R 2 are hydrogen atom, halogen atom, alkyl group, aryl group, aralkyl group, alkoxy group, aryloxy group or cycloalkyl group, Q Is, -OH or, -OROCH = CH 2 (R is C1~ 12 alkylene groups), (-OH) / (-OROCH = CH 2 ) = 10/90 to 90/10 (molar ratio) can be varied. A is a C1-30 hydrocarbon group. ] The resin composition of the photopolymerizable monomer which has a vinyloxyalkyl group represented by these, and (2) cationic photopolymerization initiator (3) solvent. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2005083521-A1 |
| priorityDate | 1993-08-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 92.