http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0695396-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-30 |
| filingDate | 1992-07-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dbedb1a5039de4a4d2212c916ad759ca http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_77fba7dc6888e520ca0801fd3941ee20 |
| publicationDate | 1994-04-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-H0695396-A |
| titleOfInvention | Developer composition and developing method |
| abstract | (57) [Summary] [PROBLEMS] To provide a resist developer composition which does not corrode an oxide film in a multilayer substrate having an oxide film and an amphoteric metal film, and a developing method using the same. [Structure] A transparent electrode made of an ITO film 2 is formed on a glass substrate 1, and an aluminum film 6 is formed on a part of the transparent electrode. A positive resist coating film 7 is applied on the aluminum coating film 6, dried and exposed to ultraviolet rays, and thereafter, the unnecessary resist coating film 7 is removed by a developer containing a peroxide according to the present invention. After the aluminum coating 6 is processed by etching, the resist coating film 7 is removed with a release agent to complete the pattern. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7399578-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7097960-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2005070763-A |
| priorityDate | 1992-07-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 92.