http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0691144-B2
Outgoing Links
Predicate | Object |
---|---|
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 |
filingDate | 1990-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 1994-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | JP-H0691144-B2 |
titleOfInvention | Radiation thermometer for measuring wafer temperature and method for measuring wafer temperature |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2007180286-A |
priorityDate | 1990-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 13.